Nanofabrication technology is one of key fields for nanoscience and nanotechnology，which aims to fabricate artificial structures/devices with critical dimensions down to nano or even atomic scale. With ever-increasing demand in continuous shrinkage of size, quality and controllability amelioration, decrease of energy consumption and reduction of cost, innovative fabrication processes, technologies and methodologies are urgently required to emerge. In particular, recent rapid development of novel low-dimensional functional materials not only prompts the innovation of structure and device configurations but also promotes the increased portion of bottom-up strategies in conventional top-down nanofabrication technologies. The purpose of the Nanofabrication Branch is to provide a broad platform for the exchange of nanofabrication principles, technologies and equipment, and to build a bridge for efficient communication between academia and industry.
Topics include but not limited to:
1. Innovative fabrication and integration processes, technologies and methodologies for extreme critical sizes and quality of artificial structures/devices
2. Precise fabrication of novel low-dimensional materials-based structures/devices
3. Novel facilities and fabrication techniques based on new principles and theory
4. Industry-oriented large-scale fabrication strategies and equipment
Junjie Li
Institute of Physics, Chinese Academy of Sciences
Xiulan Cheng
Shanghai Jiao Tong University
Zhongming Zeng
Director of Suzhou Nanofabrication center
Suzhou Institute of Nano-Tech and Nano-Bionics (SINANO), Chinese Academy of Sciences
Peipei Chen
National Center for Nanoscience and Technology, China
Jian Zhang
National Center for Nanoscience and Technology, China